JPH0353787B2 - - Google Patents

Info

Publication number
JPH0353787B2
JPH0353787B2 JP56169812A JP16981281A JPH0353787B2 JP H0353787 B2 JPH0353787 B2 JP H0353787B2 JP 56169812 A JP56169812 A JP 56169812A JP 16981281 A JP16981281 A JP 16981281A JP H0353787 B2 JPH0353787 B2 JP H0353787B2
Authority
JP
Japan
Prior art keywords
film
insulating film
metal
forming
entire surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56169812A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5871661A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP56169812A priority Critical patent/JPS5871661A/ja
Publication of JPS5871661A publication Critical patent/JPS5871661A/ja
Publication of JPH0353787B2 publication Critical patent/JPH0353787B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]

Landscapes

  • Formation Of Insulating Films (AREA)
JP56169812A 1981-10-23 1981-10-23 薄膜トランジスタの製造方法 Granted JPS5871661A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56169812A JPS5871661A (ja) 1981-10-23 1981-10-23 薄膜トランジスタの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56169812A JPS5871661A (ja) 1981-10-23 1981-10-23 薄膜トランジスタの製造方法

Publications (2)

Publication Number Publication Date
JPS5871661A JPS5871661A (ja) 1983-04-28
JPH0353787B2 true JPH0353787B2 (en]) 1991-08-16

Family

ID=15893352

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56169812A Granted JPS5871661A (ja) 1981-10-23 1981-10-23 薄膜トランジスタの製造方法

Country Status (1)

Country Link
JP (1) JPS5871661A (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2512702B2 (ja) * 1983-03-28 1996-07-03 株式会社小松製作所 薄膜トランジスタ及びその製造方法
US4754614A (en) * 1986-02-07 1988-07-05 Mitsubishi Denki Kabushiki Kaisha Prime-motor-driven room warming/cooling and hot water supplying apparatus
JPS62271471A (ja) * 1986-05-20 1987-11-25 Sanyo Electric Co Ltd 薄膜トランジスタ
US5352907A (en) * 1991-03-29 1994-10-04 Casio Computer Co., Ltd. Thin-film transistor

Also Published As

Publication number Publication date
JPS5871661A (ja) 1983-04-28

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